> ASML's EUV machines cannot be reverse engineered.
Probably not as carbon-copy. But certainly important parts, or older versions.
ASML isn't just selling a millions-dollar-machine, they sell maintenance, support, upgrades, refurbishing. All these pieces are important in themselves, not just the whole assembled machine. Any single piece that can be reversed-engineered can be a danger to their moat.
This isn't just ASML, this is any hi-tech industry. I worked in power-plants, where ABB didn't just sell us gas-turbines, they sold a package, from Swiss engineers coming twice a year to help us tune them to "we now have these nozzles that make them 1.2% more efficient in hot weather, we can come replace them".
Or the story on the HN frontpage recently, where Russian airlines are running out of brakes: just imagine being, say, a Russian factory that makes, say, brakes for Tupolevs and you can reverse-engineer Airbus brakes and start making them. High margins guaranteed.
So yes: ASML is rightfully very careful with Chinese competion and espionage¹
¹ https://nos-nl.translate.goog/artikel/2280228-wat-heeft-de-c...