In nanoimprint lithograhy, a stamp is pressed into the resist on wafer and leaves the desired pattern behind.
The difference is that the resist is removed mechanically instead of chemically.
For the case of chip lithography they'd probably make source masks, copy the first generation a time or two, and use those secondary source masks to produce consumable 'stamps' for production.
Hopefully the stamps maintain sufficient quality across at least a couple batches (50-100+?) of wafers.